Influence of Metastable Argon Atoms and Dust Particles on Gas Discharge Plasma

نویسندگان

چکیده

The model of a DC glow discharge with metastable argon atoms and dust particles based on the Boltzmann equation for electron energy distribution function (EEDF), particle charging, balance is presented. processes direct stepwise impact ionization, metastable-metastable collisions, recombination electrons ions surface tube wall are taken into account. results show that densities in strong correlation, both sufficiently influence gas parameters.

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Influence of Metastable Argon Atoms and Dust Particles on Gas Discharge Plasma

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ژورنال

عنوان ژورنال: Ukrainian Journal of Physics

سال: 2022

ISSN: ['2071-0186', '2071-0194']

DOI: https://doi.org/10.15407/ujpe56.12.1272